Nanolithography - Optical Lithography

Optical Lithography

Optical lithography, which has been the predominant patterning technique since the advent of the semiconductor age, is capable of producing sub-100-nm patterns with the use of very short wavelengths (currently 193 nm). Optical lithography will require the use of liquid immersion and a host of resolution enhancement technologies (phase-shift masks (PSM), optical proximity correction (OPC)) at the 32 nm node. Most experts feel that traditional optical lithography techniques will not be cost effective below 22 nm. At that point, it may be replaced by a next-generation lithography (NGL) technique. A new one, Quantum Optical Lithography announced a resolution of 2 nm half-pitch lines at SPIE Advanced Lithography 2012.

Read more about this topic:  Nanolithography

Famous quotes containing the word optical:

    It is said that a carpenter building a summer hotel here ... declared that one very clear day he picked out a ship coming into Portland Harbor and could distinctly see that its cargo was West Indian rum. A county historian avers that it was probably an optical delusion, the result of looking so often through a glass in common use in those days.
    —For the State of New Hampshire, U.S. public relief program (1935-1943)