Computational Lithography

Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as the semiconductor industry grappled with the challenges associated with the transition to 22 nanometer CMOS process technology and beyond.

Read more about Computational LithographyContext: Industry Forced To Extend 193nm Deep UV Photolithography, A Short History of Computational Lithography, Techniques Comprising Computational Lithography, A CPU-century Worth of Calculations or More

Other articles related to "computational lithography, computational":

Computational Lithography - A CPU-century Worth of Calculations or More
... The computational effort behind these methods is immense ... or any of the several other systems that will to be modeled in production computational photolithographic mask making flows ... accelerator dedicated for use in making computational lithographic calculations — a mask-making shop can purchase a large number of their systems to run in parallel ...