Some articles on photoresists, photoresist:

Negative Photoresist
... Contrary to past types, current negative photoresists tend to exhibit better adhesion to various substrates such as Si, GaAs, InP and glass, as well as metals, including ... the current generation of G, H and I-line negative-tone photoresists exhibit higher temperature resistance over positive resists ... One very common negative photoresist is based on epoxy-based polymer ...