Excimer Laser Lithography

Some articles on excimer laser, excimer lasers:

Excimer Lasers - Major Applications
... The ultraviolet light from an excimer laser is well absorbed by biological matter and organic compounds ... Rather than burning or cutting material, the excimer laser adds enough energy to disrupt the molecular bonds of the surface tissue, which effectively disintegrates into the air in a tightly controlled manner through ... Thus excimer lasers have the useful property that they can remove exceptionally fine layers of surface material with almost no heating or change to the remainder of the material ...