Wafer Stage

Some articles on wafers, wafer, wafer stage:

Stepper - Basic Operation
... The silicon wafers are coated with photoresist, and placed in a cassette or "boat" that holds a number of wafers ... This is then placed in a part of the stepper called the wafer loader, usually located at the lower front of the stepper ... A robot in the wafer loader picks up one of the wafers from the cassette and loads it onto the wafer stage where it is aligned to enable another, finer alignment process that will occur later on ...

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