Mems

Some articles on mems:

Micropump - Types and Technology - Technical Barrier in Development
... barrier in the development of Biomedical MEMS micropumps lies in the lack of understanding of the physical phenomena (Wong, K ... with the addition of the functions of MEMS-based micropumps interacting with multiple physical fields and having to rely on thermal, mechanical, electrical ... tools are required for the successful implementation of MEMS-based drug delivery systems ...
Microelectromechanical Systems
... Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small devices it merges at ... MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe) ... MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics ...
Capillary Condensation - Real-world Applications and Problems - MEMS
... Microelectromechanical systems (MEMS) are used in a number of different applications and have become increasingly more prevalent in nanoscale applications ...
Bio-MEMS - Approaches - Materials - Silicon and Glass
... sputtering, anodic bonding, and fusion bonding have been used in bio-MEMS to make flow channels, flow sensors, chemical detectors, separation capillaries, mixers, filters, pumps and valves ... Due to being single-use only, larger than their MEMS counterparts, and the requirement of clean room facilities, high material and processing costs make silicon-based ... In vivo, silicon-based bio-MEMS can be readily functionalized to minimize protein adsorption, but the brittleness of silicon remains a major issue ...
Micro-Opto-Electro-Mechanical Systems - History of MOEMS
... innovator in the areas of both Micro-Electro-Mechanical Systems (MEMS) and Micro-optics, used internally the acronym of MOEMS for Micro-Opto-Electro-Mechanical ... This was to distinguish between Optical MEMS and MOEMS, where Optical MEMS could include bulk optics but MOEMS is truly based on microtechnology where MOEMS devices are batched processed exactly like ... MOEMS for the first time, as the powerful combination of MEMS and Micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and ...