Tungsten Hexafluoride

Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colorless compound is a gas under standard conditions, with a density of about 13 g/L (roughly 11 times heavier than air.), WF6 is one of the heaviest known gases under standard conditions. WF6 gas is most commonly used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition – upon decomposition, molecules of WF6 leave a residue of metallic tungsten. This layer serves as low-resistive metallic "interconnect".

Read more about Tungsten Hexafluoride:  Properties, Synthesis, Reactions, Applications in Semiconductor Industry, Other Applications, Safety, Related Compounds, Trivia

Other articles related to "hexafluoride, tungsten, tungsten hexafluoride":

Molybdenum Hexafluoride - Applications
... Molybdenum hexafluoride has few uses, and generally appears as an impurity in uranium hexafluoride (in the nuclear industry, since molybdenum is a fission product of uranium) or tungsten ...
Tungsten Hexafluoride - Trivia
... In his book Uncle Tungsten, Oliver Sacks describes how his uncle—an avid fan of tungsten and tungsten chemistry—told him about the very high-density of gaseous WF6 ...