Molybdenum Hexafluoride - Applications


Molybdenum hexafluoride has few uses, and generally appears as an impurity in uranium hexafluoride (in the nuclear industry, since molybdenum is a fission product of uranium) or tungsten hexafluoride (in the semiconductor industry; WF6 is used for chemical vapour deposition of tungsten, and MoF6 appears due to the chemical similarity of molybdenum and tungsten); it can be removed from the latter by reduction of a WF6-MoF6 mixture with any of a number of elements including molybdenum at moderately elevated temperature.

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