Bio-MEMS - Approaches - Materials - Silicon and Glass

Silicon and Glass

Conventional micromachining techniques such as wet etching, dry etching, deep reactive ion etching, sputtering, anodic bonding, and fusion bonding have been used in bio-MEMS to make flow channels, flow sensors, chemical detectors, separation capillaries, mixers, filters, pumps and valves. However, there are some drawbacks to using silicon-based devices in biomedical applications such as their high cost and bioincompatibility. Due to being single-use only, larger than their MEMS counterparts, and the requirement of clean room facilities, high material and processing costs make silicon-based bio-MEMS less economically attractive. In vivo, silicon-based bio-MEMS can be readily functionalized to minimize protein adsorption, but the brittleness of silicon remains a major issue.

Read more about this topic:  Bio-MEMS, Approaches, Materials

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